Inventor

HUMMER ELMAR

AT2 patents

Patents

2 patents

US4762756AAug 9, 1988

Thermochemical surface treatments of materials in a reactive gas plasma

BALZERS HOCHVAKUUM42 citations89

US4749587AJun 7, 1988

Process for depositing layers on substrates in a vacuum chamber

BALZERS HOCHVAKUUM35 citations89