Inventor
YASUTAKE NOBUYUKI
JP11 patents
Patents
11 patentsUS5917360AJun 29, 1999
Differential current-switch circuit, D/A conversion circuit and method of transient response reduction
FUJITSU LTD26 citations92
US5404018AApr 4, 1995
Method of and an apparatus for charged particle beam exposure
FUJITSU LTD22 citations92
US5134398AJul 28, 1992
Digital-to-analog converter having a circuit for compensating for variation in output dependent on temperature change
FUJITSU LTD22 citations92
US4853870AAug 1, 1989
Electron beam exposure system
FUJITSU LTD45 citations89
US5223719AJun 29, 1993
Mask for use in a charged particle beam apparatus including beam passing sections
FUJITSU LTD7 citations74
US6046459AApr 4, 2000
Method and system for charged particle beam exposure
FUJITSU LTD7 citations73
US5981118ANov 9, 1999
Method for charged particle beam exposure with fixed barycenter through balancing stage scan
FUJITSU LTD10 citations73
US5208560AMay 4, 1993
Signal transmission circuit
FUJITSU LTD18 citations73
US4607333AAug 19, 1986
Electron beam exposure apparatus
FUJITSU LTD14 citations73
US4651033AMar 17, 1987
Device for complementary input signals using two circuits with different threshold voltages
FUJITSU LTD15 citations72
US5368613ANov 29, 1994
Electron beam exposure apparatus
FUJITSU LTD4 citations62