Inventor
ISOKAWA HIDETATSU
JP8 patents
Patents
8 patentsUS10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US10957546B2Mar 23, 2021
Substrate processing apparatus and method of controlling the same
EBARA CORP0 citations57
US11380561B2Jul 5, 2022
Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device
EBARA CORP0 citations48
US12119246B2Oct 15, 2024
Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device
EBARA CORP0 citations47
US11541502B2Jan 3, 2023
Substrate processing apparatus
EBARA CORP0 citations46
US11173523B2Nov 16, 2021
Substrate processing apparatus
EBARA CORP0 citations41
US10845777B2Nov 24, 2020
Teaching device and teaching method
EBARA CORP0 citations36