Inventor

KOBUSHI KAZUHIRO

JP4 patents

Patents

4 patents

US4897368AJan 30, 1990

Method of fabricating a polycidegate employing nitrogen/oxygen implantation

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD106 citations95

US4839302AJun 13, 1989

Method for fabricating bipolar semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD12 citations72

US4954454ASep 4, 1990

Method for fabricating a polycrystalline silicon resistor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations61

US5396312AMar 7, 1995

Apparatus for optically forming pattern

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations57