Inventor

APPEL GREGORY A

US4 patents

⚠️ This page may combine multiple inventors who share the name “APPEL GREGORY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APLEX INC

3 patents

US6000997ADec 14, 1999

APLEX GROUP

1 patent

US6080040AJun 27, 2000

Wafer carrier head with inflatable bladder and attack angle control for polishing

APLEX GROUP30 citations90

APPEL GREGORY A

APLEX INC

Temperature regulation in a CMP process

Polishing head for a chemical mechanical polishing apparatus

Wafer polishing head drive

APLEX GROUP

Wafer carrier head with inflatable bladder and attack angle control for polishing