Inventor

ISOBE HIDEJI

JP3 patents

Patents

3 patents

US6558229B2May 6, 2003

Polishing apparatus

EBARA CORP96 citations96

US6984164B2Jan 10, 2006

Polishing apparatus

EBARA CORP9 citations72

US6764381B2Jul 20, 2004

Polishing apparatus

EBARA CORP10 citations72