Inventor

SCHAFGANS ALEXANDER

US4 patents

⚠️ This page may combine multiple inventors who share the name “SCHAFGANS ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9380691B2Jun 28, 2016

Adaptive laser system for an extreme ultraviolet light source

ASML NETHERLANDS BV7 citations82

US9516729B2Dec 6, 2016

Variable radius mirror dichroic beam splitter module for extreme ultraviolet source

ASML NETHERLANDS BV3 citations68

US9209595B2Dec 8, 2015

Catalytic conversion of an optical amplifier gas medium

ASML NETHERLANDS BV0 citations34

CYMER INC

1 patent

US8872122B2Oct 28, 2014

Method of timing laser beam pulses to regulate extreme ultraviolet light dosing

CYMER INC6 citations69