Inventor
ARYA ANKUR
US3 patents
Patents
3 patentsUS10269932B1Apr 23, 2019
Asymmetric formation of epi semiconductor material in source/drain regions of FinFET devices
GLOBALFOUNDRIES INC42 citations91
US10832965B2Nov 10, 2020
Fin reveal forming STI regions having convex shape between fins
GLOBALFOUNDRIES INC1 citations60
US10593555B2Mar 17, 2020
Composite sacrificial gate with etch selective layer
GLOBALFOUNDRIES INC1 citations58