Inventor
GAW ENG T
CA6 patents
Patents
6 patentsUS6303464B1Oct 16, 2001
Method and structure for reducing interconnect system capacitance through enclosed voids in a dielectric layer
INTEL CORP87 citations96
US5384219AJan 24, 1995
Reticle with structurally identical inverted phase-shifted features
INTEL CORP56 citations93
US5348826ASep 20, 1994
Reticle with structurally identical inverted phase-shifted features
INTEL CORP25 citations91
US5633102AMay 27, 1997
Lithography using a new phase-shifting reticle
INTEL CORP25 citations89
US5354632AOct 11, 1994
Lithography using a phase-shifting reticle with reduced transmittance
INTEL CORP43 citations89
US5300379AApr 5, 1994
Method of fabrication of inverted phase-shifted reticle
INTEL CORP41 citations88