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Inventor
YOON YONG-HYEOCK
KR
2 patents
Patents
2 patents
US5451291A
Sep 19, 1995
Method for forming a via contact hole of a semiconductor device
HYUNDAI ELECTRONICS IND
35 citations
87
US6107138A
Aug 22, 2000
Method for fabricating a semiconductor device having a tapered contact hole
HYUNDAI ELECTRONICS IND
4 citations
57