Inventor
WADA GLEN N
US3 patents
Patents
3 patentsUS5731242AMar 24, 1998
Self-aligned contact process in semiconductor fabrication
INTEL CORP147 citations97
US6194784B1Feb 27, 2001
Self-aligned contact process in semiconductor fabrication and device therefrom
INTEL CORP53 citations95
US5087584AFeb 11, 1992
Process for fabricating a contactless floating gate memory array utilizing wordline trench vias
INTEL CORP65 citations93