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Inventor
OMORI MASASHI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “OMORI MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
2 patents
US5709037A
Jan 20, 1998
Stream drying process
MITSUBISHI ELECTRIC CORP
21 citations
91
US5608974A
Mar 11, 1997
Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process
MITSUBISHI ELECTRIC CORP
40 citations
91
SPC ELECTRONICS
1 patent
US6616774B2
Sep 9, 2003
Wafer cleaning device and tray for use in wafer cleaning device
SPC ELECTRONICS
7 citations
65
SHIMADA RIKA KOGYO KK
1 patent
US6432218B1
Aug 13, 2002
Multi-step flow cleaning method and multi-step flow cleaning apparatus
SHIMADA RIKA KOGYO KK
2 citations
57