Inventor
OZAWA SOICHIRO
JP4 patents
Patents
4 patentsUS6674633B2Jan 6, 2004
Process for producing a strontium ruthenium oxide protective layer on a top electrode
FUJITSU LTD19 citations91
US6617626B2Sep 9, 2003
Ferroelectric semiconductor memory device and a fabrication process thereof
FUJITSU LTD7 citations72
US6044850AApr 4, 2000
Semiconductor device manufacturing method including ashing process
FUJITSU LTD9 citations71
US6777287B2Aug 17, 2004
Ferroelectric semiconductor memory device and a fabrication process thereof
FUJITSU LTD1 citations51