Inventor
BERNHARDT DAVID K
US3 patents
Patents
3 patentsUS7402821B2Jul 22, 2008
Application of digital frequency and phase synthesis for control of electrode voltage phase in a high-energy ion implantation machine, and a means for accurate calibration of electrode voltage phase
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US7924159B2Apr 12, 2011
Remote wafer presence detection with passive RFID
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US7321299B2Jan 22, 2008
Workpiece handling alignment system
AXCELIS TECH INC5 citations56