P

Inventor

MATSUSHITA TAKAYA

JP11 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA TAKAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

4 patents
US5310454AMay 10, 1994

Dry etching method

TOSHIBA KK54 citations96
US6627557B2Sep 30, 2003

Semiconductor device and method for manufacturing the same

TOSHIBA KK22 citations92
US7232763B2Jun 19, 2007

Method of manufacturing semiconductor device

TOSHIBA KK5 citations62
US7943459B2May 17, 2011

Semiconductor device and method of manufacturing the semiconductor device

TOSHIBA KK0 citations51

TOKYO ELECTRON LTD

3 patents
US5595627AJan 21, 1997

Plasma etching method

TOKYO ELECTRON LTD171 citations98
US5356515AOct 18, 1994

Dry etching method

TOKYO ELECTRON LTD139 citations97
US5271788ADec 21, 1993

Plasma processing apparatus

TOKYO ELECTRON LTD38 citations92

TOMOEGAWA PAPER CO LTD

2 patents
US5851641ADec 22, 1998

Electrostatic chucking device

TOMOEGAWA PAPER CO LTD36 citations92
US5645921AJul 8, 1997

Electrostatic chucking device

TOMOEGAWA PAPER CO LTD27 citations92

APPLIED MATERIALS INC

1 patent
US12525260B2Jan 13, 2026

Wordline sidewall contacts in 3D NAND structures

APPLIED MATERIALS INC0 citations58

OMURA MITSUHIRO

1 patent
US8513134B2Aug 20, 2013

Semiconductor device producing method

OMURA MITSUHIRO2 citations57