Inventor
UJIMARU NAOHIKO
JP3 patents
Patents
3 patentsUS7474382B2Jan 6, 2009
Method for determining focus deviation amount in pattern exposure and pattern exposure method
PANASONIC CORP5 citations55
US7838185B2Nov 23, 2010
Focus measurement method and method of manufacturing a semiconductor device
PANASONIC CORP2 citations54
US7883840B2Feb 8, 2011
Developing method and method for fabricating semiconductor device using the developing method
PANASONIC CORP0 citations33