Inventor
HAYAMIZU HIDETAKA
JP4 patents
Patents
4 patentsUS7015291B2Mar 21, 2006
Process for the production of high-molecular compounds for photoresist
DAICEL CHEM4 citations71
US7816471B2Oct 19, 2010
Process for producing photoresist polymeric compounds
DAICEL CHEM3 citations60
US7662897B2Feb 16, 2010
Process for producing photoresist polymeric compounds
DAICEL CHEM3 citations60
US7655743B2Feb 2, 2010
Process for producing photoresist polymeric compounds
DAICEL CHEM3 citations60