Inventor

OSTROWSKI KIRK J

US4 patents

⚠️ This page may combine multiple inventors who share the name “OSTROWSKI KIRK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEUNG DAVID

2 patents

US8129281B1Mar 6, 2012

Plasma based photoresist removal system for cleaning post ash residue

CHEUNG DAVID30 citations90

US8716143B1May 6, 2014

Plasma based photoresist removal system for cleaning post ash residue

CHEUNG DAVID7 citations82

NOVELLUS SYSTEMS INC

1 patent

US9564344B2Feb 7, 2017

Ultra low silicon loss high dose implant strip

NOVELLUS SYSTEMS INC2 citations69

LAM RES CORP

1 patent

US11062897B2Jul 13, 2021

Metal doped carbon based hard mask removal in semiconductor fabrication

LAM RES CORP4 citations67