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Inventor
MORIYA MACHI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “MORIYA MACHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US7733502B2
Jun 8, 2010
Roughness evaluation method and system
TOKYO ELECTRON LTD
5 citations
58
TANAKA KEISUKE
1 patent
US8853087B2
Oct 7, 2014
Method of manufacturing semiconductor device and system for manufacturing semiconductor device
TANAKA KEISUKE
0 citations
36
OHNO TSUYOSHI
1 patent
US8778205B2
Jul 15, 2014
Processing method and processing system
OHNO TSUYOSHI
0 citations
29