P
PatentIndex
Search
Landscape
Sign in
Inventor
KARUR-SHANMUGAM RAMKUMAR
US
2 patents
Patents
2 patents
US10466596B2
Nov 5, 2019
System and method for field-by-field overlay process control using measured and estimated field parameters
KLA TENCOR CORP
4 citations
66
US10340165B2
Jul 2, 2019
Systems and methods for automated multi-zone detection and modeling
KLA TENCOR CORP
2 citations
63