Inventor
RATTNER MICHAEL B
US3 patents
Patents
3 patentsUS6902947B2Jun 7, 2005
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC89 citations96
US6830950B2Dec 14, 2004
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC27 citations91
US6900133B2May 31, 2005
Method of etching variable depth features in a crystalline substrate
APPLIED MATERIALS INC14 citations82