Inventor

MIYAZAWA KOUICHI

JP2 patents

Patents

2 patents

US7033089B2Apr 25, 2006

Method of developing a resist film and a resist development processor

HITACHI SCIENCE SYSTEMS LTD6 citations69

US7179000B2Feb 20, 2007

Method of developing a resist film and a resist development processor

HITACHI SCIENCE SYSTEMS LTD0 citations48