Inventor

HOEFNAGELS PIETER JEROEN JOHAN EMANUEL

NL2 patents

Patents

2 patents

US11372339B1Jun 28, 2022

Device manufacturing method and computer program

ASML NETHERLANDS BV0 citations53

US10534271B2Jan 14, 2020

Lithography apparatus and a method of manufacturing a device

ASML NETHERLANDS BV0 citations34