Inventor

MATSUZAWA EIICHI

JP2 patents

Patents

2 patents

US7701236B2Apr 20, 2010

Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer

TOKYO ELECTRON LTD16 citations82

US10823778B2Nov 3, 2020

Inspection system

TOKYO ELECTRON LTD3 citations70