Inventor

KIMOTO KOUJI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KIMOTO KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US10593571B2Mar 17, 2020

Substrate processing apparatus

TOKYO ELECTRON LTD3 citations68

US11139181B2Oct 5, 2021

Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block

TOKYO ELECTRON LTD4 citations66

US12255081B2Mar 18, 2025

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations50

MURATA AKIRA

1 patent

US8845262B2Sep 30, 2014

Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program

MURATA AKIRA1 citations49