Inventor
CHEN TING-KOU
TW3 patents
Patents
3 patentsUS6598278B2Jul 29, 2003
Sponge sleeve installation appliance
WINBOND ELECTRONICS CORP14 citations77
US6382861B1May 7, 2002
Cleaning device for cleaning dirt produced from manufacturing equipment
WINBOND ELECTRONICS CORP2 citations58
US6305062B1Oct 23, 2001
Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof
WINBOND ELECTRONICS CORP2 citations51