Inventor
GELLRICH BERNARD
DE4 patents
⚠️ This page may combine multiple inventors who share the name “GELLRICH BERNARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS7545481B2Jun 9, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations95
US7352433B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US7532304B2May 12, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73