Inventor
KASHIWA MORIYUKI
JP3 patents
Patents
3 patentsUS7238087B1Jul 3, 2007
Planarizing device and a planarization method for semiconductor substrates
OKAMOTO MACHINE TOOL WORKS35 citations90
US8366514B2Feb 5, 2013
Semiconductor substrate planarization apparatus and planarization method
OKAMOTO MACHINE TOOL WORKS4 citations58
US8047897B2Nov 1, 2011
Substrate flat grinding device
OKAMOTO MACHINE TOOL WORKS0 citations39