Inventor
COLBORNE KELLY
US4 patents
Patents
4 patentsUS5855681AJan 5, 1999
Ultra high throughput wafer vacuum processing system
APPLIED MATERIALS INC1,143 citations98
US6082950AJul 4, 2000
Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding
APPLIED MATERIALS INC154 citations97
US5902088AMay 11, 1999
Single loadlock chamber with wafer cooling function
APPLIED MATERIALS INC115 citations97
US5838121ANov 17, 1998
Dual blade robot
APPLIED MATERIALS INC112 citations97