Inventor
CHOI HYUN SUN
KR2 patents
Patents
2 patentsUS10103043B2Oct 16, 2018
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD6 citations78
US10566221B2Feb 18, 2020
Apparatus for transferring substrate and apparatus for processing substrate including the same
SAMSUNG ELECTRONICS CO LTD0 citations46