Inventor · disambiguated record
Kul Inn
Also filed as: INN Kul
4 granted patents·6 citations·filing 2016–2021
65Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0180US11490499B2Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Nov 1, 2022·1 cites·20 claims
- 0279US10481005B2Semiconductor substrate measuring apparatus and plasma treatment apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Nov 19, 2019·3 cites·20 claims
- 0376US10229818B2Apparatus for monitoring process chamberSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Mar 12, 2019·2 cites·20 claims
- 0457US10971343B2Apparatus for monitoring process chamberSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 6, 2021·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →