Inventor
CHEN ING-TANG
TW4 patents
Patents
4 patentsUS6093634AJul 25, 2000
Method of forming a dielectric layer on a semiconductor wafer
UNITED MICROELECTRONICS CORP10 citations71
US6426546B1Jul 30, 2002
Reducing relative stress between HDP layer and passivation layer
UNITED MICROELECTRONICS CORP3 citations60
US6136164AOct 24, 2000
Apparatus for detecting position of collimator in sputtering processing chamber
UNITED MICROELECTRONICS CORP4 citations60
US6657283B2Dec 2, 2003
Reducing relative stress between HDP layer and passivation layer
UNITED MICROELECTRONICS CORP0 citations39