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Inventor
SWINDAL J CHRISTIAN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “SWINDAL J CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
1 patent
US7573580B2
Aug 11, 2009
Optical position measuring system and method using a low coherence light source
ASML HOLDING NV
3 citations
53
ASML NETHERLANDS BV
1 patent
US9506743B2
Nov 29, 2016
Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV
0 citations
40
SWINDAL J CHRISTIAN
1 patent
USRE44434E
Aug 13, 2013
Optical position measuring system and method using a low coherence light source
SWINDAL J CHRISTIAN
0 citations
36