Inventor

KU JA DAE

KR3 patents

Patents

3 patents

US10840118B2Nov 17, 2020

Substrate processing apparatus and method for assembling tube assembly

EUGENE TECHNOLOGY CO LTD3 citations70

US10364494B2Jul 30, 2019

Substrate processing apparatus

EUGENE TECHNOLOGY CO LTD2 citations70

US11488845B2Nov 1, 2022

Substrate processing apparatus

EUGENE TECHNOLOGY CO LTD0 citations49