Inventor
JUNG BONG JU
KR3 patents
Patents
3 patentsUS10840118B2Nov 17, 2020
Substrate processing apparatus and method for assembling tube assembly
EUGENE TECHNOLOGY CO LTD3 citations70
US10364494B2Jul 30, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD2 citations70
US11488845B2Nov 1, 2022
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations49