Inventor
KANG MAN KYU
KR5 patents
⚠️ This page may combine multiple inventors who share the name “KANG MAN KYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
4 patentsUS10763152B2Sep 1, 2020
Substrate support unit, heat treatment unit, and substrate treating apparatus including the same
SEMES CO LTD3 citations63
US11735443B2Aug 22, 2023
Hot plate, substrate heat-treating apparatus including the hot plate, and method of fabricating the hot plate
SEMES CO LTD0 citations49
US11766765B2Sep 26, 2023
Substrate treatment apparatus
SEMES CO LTD0 citations47
US11776826B2Oct 3, 2023
Apparatus and method for treating substrate
SEMES CO LTD0 citations41