Inventor

THOKACHICHU SATYA TEJA BABU

US2 patents

Patents

2 patents

US12136549B2Nov 5, 2024

Plasma-enhanced chemical vapor deposition of carbon hard-mask

APPLIED MATERIALS INC0 citations58

US11560623B2Jan 24, 2023

Methods of reducing chamber residues

APPLIED MATERIALS INC0 citations48