Inventor
CHAKI KATUHIRO
JP3 patents
Patents
3 patentsUS6059885AMay 9, 2000
Vapor deposition apparatus and method for forming thin film
TOSHIBA CERAMICS CO290 citations98
US6113705ASep 5, 2000
High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method
TOSHIBA CERAMICS CO68 citations95
US6132519AOct 17, 2000
Vapor deposition apparatus and vapor deposition method
TOSHIBA CERAMICS CO3 citations61