Inventor

KITAHARA HIDEKAZU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KITAHARA HIDEKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

US7426016B2Sep 16, 2008

Exposure apparatus and exposure method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations55

PANASONIC CORP

1 patent

US7883840B2Feb 8, 2011

Developing method and method for fabricating semiconductor device using the developing method

PANASONIC CORP0 citations33