Inventor
PARK SOON-JONG
KR9 patents
⚠️ This page may combine multiple inventors who share the name “PARK SOON-JONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS6198982B1Mar 6, 2001
Method and apparatus for detecting the presence of particles on a wafer holder of semiconductor exposure equipment
SAMSUNG ELECTRONICS CO LTD31 citations85
US6043892AMar 28, 2000
Exposure field sensor of a chip leveling apparatus having an aperture for changing at least one dimension of the incident light of the sensor
SAMSUNG ELECTRONICS CO LTD11 citations71
US5933220AAug 3, 1999
Apparatus and method for limiting double exposure in stepper
SAMSUNG ELECTRONICS CO LTD7 citations71
US6026986AFeb 22, 2000
Chemical spray system and waste liquid tank used in same
SAMSUNG ELECTRONICS CO LTD14 citations66
US6744489B2Jun 1, 2004
Semiconductor exposure apparatus and method of driving the same
SAMSUNG ELECTRONICS CO LTD2 citations60
US7456641B2Nov 25, 2008
Probe card that controls a temperature of a probe needle, test apparatus having the probe card, and test method using the test apparatus
SAMSUNG ELECTRONICS CO LTD4 citations56
US6166646ADec 26, 2000
Vacuum-adsorbing apparatus of semiconductor device fabrication facility
SAMSUNG ELECTRONICS CO LTD5 citations53