Inventor
TIROSH EHUD
IL26 patents
⚠️ This page may combine multiple inventors who share the name “TIROSH EHUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6175645B1Jan 16, 2001
Optical inspection method and apparatus
APPLIED MATERIALS INC175 citations99
US6268093B1Jul 31, 2001
Method for reticle inspection using aerial imaging
APPLIED MATERIALS INC205 citations98
US6178257B1Jan 23, 2001
Substrate inspection method and apparatus
APPLIED MATERIALS INC178 citations98
US5982921ANov 9, 1999
Optical inspection method and apparatus
APPLIED MATERIALS INC103 citations98
US7133548B2Nov 7, 2006
Method and apparatus for reticle inspection using aerial imaging
APPLIED MATERIALS INC53 citations96
US6952491B2Oct 4, 2005
Optical inspection apparatus for substrate defect detection
APPLIED MATERIALS INC27 citations92
US7098468B2Aug 29, 2006
Raster frame beam system for electron beam lithography
APPLIED MATERIALS INC14 citations90
US7355689B2Apr 8, 2008
Automatic optical inspection using multiple objectives
APPLIED MATERIALS INC7 citations72
US7394531B2Jul 1, 2008
Apparatus and method for automatic optical inspection
APPLIED MATERIALS INC2 citations62
APPLIED MATERIALS ISRAEL LTD
8 patentsUS7796807B2Sep 14, 2010
Optical inspection apparatus for substrate defect detection
APPLIED MATERIALS ISRAEL LTD18 citations92
US7499583B2Mar 3, 2009
Optical inspection method for substrate defect detection
APPLIED MATERIALS ISRAEL LTD15 citations92
US7846649B2Dec 7, 2010
High resolution printer and a method for high resolution printing
APPLIED MATERIALS ISRAEL LTD9 citations84
US7521700B2Apr 21, 2009
Raster frame beam system for electron beam lithography
APPLIED MATERIALS ISRAEL LTD10 citations83
US7842935B2Nov 30, 2010
Raster frame beam system for electron beam lithography
APPLIED MATERIALS ISRAEL LTD7 citations72
US7844103B2Nov 30, 2010
Microscopic inspection apparatus for reducing image smear using a pulsed light source and a linear-periodic superpositioned scanning scheme to provide extended pulse duration, and methods useful therefor
APPLIED MATERIALS ISRAEL LTD2 citations63
US7599075B2Oct 6, 2009
Automatic optical inspection using multiple objectives
APPLIED MATERIALS ISRAEL LTD3 citations61
US7518391B2Apr 14, 2009
Probe card and a method for detecting defects using a probe card and an additional inspection
APPLIED MATERIALS ISRAEL LTD0 citations51