Inventor
KOMAKINE MITSUHIKO
JP3 patents
⚠️ This page may combine multiple inventors who share the name “KOMAKINE MITSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MIKAMI MASAKI
2 patentsUS8993201B2Mar 31, 2015
Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate
MIKAMI MASAKI2 citations59
US8580465B2Nov 12, 2013
Multilayer mirror for EUV lithography and process for its production
MIKAMI MASAKI2 citations59