Inventor
CHA BYEONG KYU
KR2 patents
Patents
2 patentsUS10199282B2Feb 5, 2019
Inspection apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12564018B2Feb 24, 2026
Operating method of electronic device configured to support manufacturing semiconductor device, and operating method of semiconductor manufacturing system including electronic devices configured to support manufacturing semiconductor dies
SAMSUNG ELECTRONICS CO LTD0 citations42