Inventor
KUPTSIS JOHN D
3 patents
Patents
3 patentsUS4312935AJan 26, 1982
Class of E-beam resists based on conducting organic charge transfer salts
IBM22 citations79
US4338392AJul 6, 1982
Class of E-beam resists based on conducting organic charge transfer salts
IBM7 citations71
US4312936AJan 26, 1982
Class of E-beam resists based on conducting organic charge transfer salts
IBM8 citations71