Inventor
PENG PENG-YIH
TW18 patents
Patents
18 patentsUS6120366ASep 19, 2000
Chemical-mechanical polishing pad
UNITED MICROELECTRONICS CORP99 citations97
US6293850B1Sep 25, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP28 citations92
US6183350B1Feb 6, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP28 citations92
US6220930B1Apr 24, 2001
Wafer polishing head
UNITED MICROELECTRONICS CORP23 citations91
US6106714AAug 22, 2000
Filtering apparatus with stirrer in a CMP apparatus
UNITED MICROELECTRONICS CORP23 citations91
US5944593AAug 31, 1999
Retainer ring for polishing head of chemical-mechanical polish machines
UNITED MICROELECTRONICS CORP64 citations91
US5993647ANov 30, 1999
Circulation system of slurry
UNITED MICROELECTRONICS CORP18 citations84
US6241582B1Jun 5, 2001
Chemical mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP6 citations73
US6206758B1Mar 27, 2001
Method for increasing working life of retaining ring in chemical-mechanical polishing machine
UNITED MICROELECTRONICS CORP9 citations73
US6119294ASep 19, 2000
Cleaning system with automatically controlled brush pressure
UNITED MICROELECTRONICS CORP8 citations73
US6062963AMay 16, 2000
Retainer ring design for polishing head of chemical-mechanical polishing machine
UNITED MICROELECTRONICS CORP10 citations73
US6096162AAug 1, 2000
Chemical mechanical polishing machine
UNITED MICROELECTRONICS CORP7 citations72
US6352244B2Mar 5, 2002
Auxiliary gasline-heating unit in chemical vapor deposition
UNITED MICROELECTRONICS CORP2 citations62
US6322057B1Nov 27, 2001
Auxiliary gasline-heating unit in chemical vapor deposition
UNITED MICROELECTRONICS CORP2 citations62
US6280079B1Aug 28, 2001
Method of mixing slurries
UNITED MICROELECTRONICS CORP5 citations62
US6051139AApr 18, 2000
Device for filtering slurry
UNITED MICROELECTRONICS CORP6 citations62
US6165255ADec 26, 2000
Chemical-liquid controlling apparatus
UNITED MICROELECTRONICS CORP2 citations61
US6234876B1May 22, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP0 citations51