Inventor
CHIU HAO-KUANG
TW8 patents
Patents
8 patentsUS6293850B1Sep 25, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP28 citations92
US6183350B1Feb 6, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP28 citations92
US6106714AAug 22, 2000
Filtering apparatus with stirrer in a CMP apparatus
UNITED MICROELECTRONICS CORP23 citations91
US6241582B1Jun 5, 2001
Chemical mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP6 citations73
US6062963AMay 16, 2000
Retainer ring design for polishing head of chemical-mechanical polishing machine
UNITED MICROELECTRONICS CORP10 citations73
US6030892AFeb 29, 2000
Method of preventing overpolishing in a chemical-mechanical polishing operation
UNITED MICROELECTRONICS CORP8 citations73
US6228420B1May 8, 2001
Method to maintain consistent thickness of thin film deposited by chemical vapor deposition
UNITED MICROELECTRONICS CORP6 citations61
US6234876B1May 22, 2001
Chemical-mechanical polish machines and fabrication process using the same
UNITED MICROELECTRONICS CORP0 citations51