Inventor
DESAI SANDEEP A
US3 patents
Patents
3 patentsUS6429126B1Aug 6, 2002
Reduced fluorine contamination for tungsten CVD
APPLIED MATERIALS INC66 citations93
US6303480B1Oct 16, 2001
Silicon layer to improve plug filling by CVD
APPLIED MATERIALS INC20 citations91
US6602770B2Aug 5, 2003
Silicon layer to improve plug filling by CVD
APPLIED MATERIALS INC0 citations50