Inventor
STELLA MARIO
GB3 patents
Patents
3 patentsUS6550091B1Apr 22, 2003
Double-sided wafer edge scrubbing apparatus and method for using the same
LAM RES CORP66 citations88
US6939207B2Sep 6, 2005
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP5 citations71
US6645052B2Nov 11, 2003
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP12 citations71