Inventor

BONIFACE JOHN D

US3 patents

⚠️ This page may combine multiple inventors who share the name “BONIFACE JOHN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7662254B2Feb 16, 2010

Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer

LAM RES CORP8 citations82

US7922866B2Apr 12, 2011

Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer

LAM RES CORP4 citations60

SEXTON GREGORY S

1 patent

US8398875B2Mar 19, 2013

Method of orienting an upper electrode relative to a lower electrode for bevel edge processing

SEXTON GREGORY S0 citations48