Inventor

MUKUNDHAN PRIYA

US7 patents

⚠️ This page may combine multiple inventors who share the name “MUKUNDHAN PRIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUDOLPH TECH INC

2 patents

US9576862B2Feb 21, 2017

Optical acoustic substrate assessment system and method

RUDOLPH TECH INC8 citations81

US10173249B2Jan 8, 2019

Calibration of semiconductor metrology systems

RUDOLPH TECH INC0 citations40

MEHENDALE MANJUSHA

2 patents

US9140601B2Sep 22, 2015

Position sensitive detection optimization

MEHENDALE MANJUSHA4 citations67

US9991176B2Jun 5, 2018

Non-destructive acoustic metrology for void detection

MEHENDALE MANJUSHA3 citations64

ONTO INNOVATION INC

2 patents

US11988641B2May 21, 2024

Characterization of patterned structures using acoustic metrology

ONTO INNOVATION INC0 citations59

US12474643B2Nov 18, 2025

System and method for performing alignment and overlay measurement through an opaque layer

ONTO INNOVATION INC0 citations53

TAS GURAY

1 patent

US8312772B2Nov 20, 2012

Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion

TAS GURAY11 citations74